Acousto-optic Scanning Spatial-switching Multiphoton Lithography

نویسندگان

چکیده

Abstract Despite of tremendous potential multiphoton lithography (MPL) in laboratorial and industrial applications, simultaneous achievement high throughput, accuracy, design freedom, a broad range material structuring capabilities remains long-pending challenge. To address the issue, we propose an acousto-optic scanning with spatial-switching multispots (AOSS) method. Inertia-free nonlinear swept techniques have been developed for achieving ultrahigh-speed aberration-free scanning. Moreover, spatial optical switch concept has implemented to significantly boost throughput while maintaining resolution freedom. An eight-foci AOSS system demonstrated record-high 3D printing rate 7.6×10^7 voxel/s, which is nearly one order magnitude higher than earlier MPL, exhibiting its promise future scalable nanomanufacturing.

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ژورنال

عنوان ژورنال: International journal of extreme manufacturing

سال: 2023

ISSN: ['2631-8644', '2631-7990']

DOI: https://doi.org/10.1088/2631-7990/ace0a7